In January 2023, we completed an expansion of temperature monitoring for exhaust ducts on Company S's semiconductor production line.

DTS monitoring has been installed on these exhaust ducts since 2018 and has been added or expanded whenever the plant has been extended or new production facilities built.

Monitoring detects developing exhaust problems caused by deposits from process gases inside the ducts and automatically identifies abnormal overheating.

The exhaust ducts and their monitoring coverage are expanded as production lines grow.

Topics: semiconductor exhaust duct monitoring, DTS and fiber optic temperature monitoring.